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| JEOL
6400F Field Emission SEM |
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The
JEOL 6400F is a Field Emission SEM that allows for high resolution
(15 - 70 angstroms). It complements the Hitachi SEM at AIF
by having this higher resolution but it has an ultra high
vacuum which does not make it suitable for all samples.
The
AIF currently has two working models of the JEOL FESEM, one
with an EDS detector that can be operated in windowls, ultra
thin and standard window modes. |
JEOL 6400F
Specifications
| Capabilities |
E-T
Secondary Electron Detector
Solid Stae BSE
Specimen Current Imaging
EBIC Imaging
EDS with Elemental Mapping
Selected Area Channeling |
| Accelerating
Voltage |
0.5
- 30 kV |
| Magnification |
20X
- 450,000X |
| SEI
Resolution |
15
Angsroms @ 30kV
70
Angsroms @ 1kV
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| Working
Distance |
5-39
mm |
| Specimen
Stage |
Eucentric
tilt -5 to +60
Rotate 360
x = 100 mm, y = 110 mm, z = 34 mm |
| Specimen
Considerations |
UHV
compatible solid
Conductor, Semiconductor, Insulator, ploymer,
textile, etc.
Specimen up to 6" dia. wafer |
| Features |
Digital
Image Capture
4pi EDS for elemental analysis |
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Last updated
January 22, 2008
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