Today is:
Analytical Instrumentation Facility
SpacerAFM image of etched Al2O3SEM image of CuCl crystalsNormarski image of carbides in steelSecondary Electron image of FIB tem sampleFESEM image of MEMS micro gearsSTEM image Multi Quantum well image in STEM
HomeInstrumentsSign-upHelpAbout UsLinks

EDS spectrum image

EDS map
 
Hitachi S-3200 Scanning Electron Microscope
Location: 122A EGRC  
Contact: Chuck Mooney
Images from Hitachi S3200 SEM

The Hitachi S3200 is a Variable Pessure Scanning Electron Microscope. This is a conventional high resolution thermionic SEM which allows the operator to control the specimen chamber vacuum level and environment. A non-conductive specimen maybe inserted directly into the VPSEM and observed in it's natural state without the need for metallized coatings.

An Oxford Isis EDS system is also attached to the instrument which allows for elemental analysis for Boron and above. The software also allows for x-ray linescans and mapping.
Hitachi S3200 Specifications
Capabilities

E-T Secondary Electron Detector
Robinson BSE
Specimen Current Imaging
EBIC Imaging
EDS with Elemental Mapping
Cathodoluminescence

Accelerating Voltage
 0.3 - 30 kV
Magnification

20X - 300,000X

SEI Resolution
 35 Angsroms @ 30kV in high vacuum
BEI Resolution
 55 Angstroms @ 30kV in variable pressure mode
Working Distance
3-60 mm
Specimen Stage
Eucentric tilt -20 to +90
Rotate 360
x = 80 mm, y = 40 mm, z = 26 mm
Specimen Considerations

Accomodates wet, oily, non-conductive samples.
Conductor, Semiconductor, Insulator, biological, ploymer, textile, etc.
Specimen up to 30 mm dia.
Features

Everhart-Thornley Detector
Robinson Backscatter Detector
Absorbed Current Meter
Digital Image Capture
IR Chamberscope for sample viewing.
Polaroid 4X5 camera also available.
 
  

Campus Box 7531 Room 318 EGRC, 2410 Campus Shore Dr., Raleigh NC 27695
Phone: (919) 515-2128 or 515-3841 Fax: (919) 515-6965