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Analytical Instrumentation Facility
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AFM image of PEO

AFM phase image of GaN

AFM image of patterned lines on Si

AFM image of MEMS gear
 
Scanning Probe Microscopy Lab
Location: 321 EGRC  
Contact: Chuck Mooney
JEOL 5200 D3000  

Chuck Mooney operating the JEOL 5200 AFM

Chuck Mooney operates the JEOL 5200 AFM. The JEOL is an environmental microscope capable of wet cell operation.

JEOL 5200 Specifications
Resolution (vertical & horizontal)
 Atomic (STM and AFM)
Scan System
 Sample Scan
Scanner

Tube Scanner, exchangeable
Standard: 10 µm in XY, 3 µm in Z
Optional: 100 µm in XY, 5 µm in Z

Force Detection
 Optical lever arm
laser light source
4 segment photodetector
Tunnel Current
30 pA to 1 µA
AFM probe
Silicon and Silicon Nitride
STM probe
0.3 mm diameter wire
Specimen Size
 XY: up to 50 mm square
Z: up to 5 mm thick
Coarse Stage Adjustment
 XY stage: +/- 3 mm
Z stage: manual adjustment 5 mm (including stepper motor)
stepper motor adjustment 1.5 mm
Stage
 Drift Free design
Ports
 Gas introduction and discharge
Vacuum evacuation
LN2 cold finger
Temperature Variation
 130K to 800K
Vacuum
 10^-3 Pa or better
Vibration Isolation

Air Suspension
Gel damper
 
 
 
  

Campus Box 7531 Room 318 EGRC, 2410 Campus Shore Dr., Raleigh NC 27695
Phone: (919) 515-2128 or 515-3841 Fax: (919) 515-6965