Multidisciplinary

University

Research

Initiative

 

1994 MURI RESEARCH CENTERS IN INTELLIGENT DESIGN AND MANUFACTURING IN ELECTRONICS AND MATERIALS PROCESSING

 

 

 
Modeling and Control of Advanced Chemical Vapor Deposition Processes:
The Control of Defects in Mixed III-V Compound Heterostructures

OBJECTIVES:

     Our overall efforts are to design an efficient rapid thermal OMCVD reactor  system, including efforts to study the initial phases for heteroepitaxial growth of GaP/Ga(x)IN(1-x)P heterostructures on silicon substrates. The approach involves a combination of remote plasma-assisted nitridation, as the processing approach, and PRS, as the real-time monitoring approach. Other topics include development of real-time measurement techniques, models for nonlinear deposition in a RTOMCVD reactor, and computational methods in support of design of reactor and real time feed back control. 
 
 
 
MEMBERS:
 

Faculty:

K.J. Bachmann
H.T. Banks
N. Dietz
K. Ito
M.J. Kushner
G. Lucovsky
S. Mahajan
J.S. Scroggs
H.T. Tran

 

Research Associates:  

G.M. Kepler

Istvan Lauko

Fuchao Wang

 

Graduate Students:

Stacie LeSure

Sonya McCall

Vijay Narayanan

Vincent Woods

PUBLICATIONS:

  1. K.J. Bachmann, N. Sukidi, C. Hoepfner, C. Harris, N. Dietz, H.T. Tran, S. Beeler, K. Ito, H.T. Banks, Real-time monitoring of steady-state pulsed chemical beam epitaxy by p-polarized reflectance, J. Cryst. Growth, 183 (1998) 323-337.
  2. V. Narayanan, N. Sukidi, N. Dietz, K. J. Bachmann, S. Mahajan and S. Shingubara, "Growth of GaP layers by chemical beam epitaxy on oxide patterned Si(001) substrates", Materials & Engineering B 207 (1998), to appear.
  3. M. Ebert, D. E. Aspnes, K.J. Bachmann and N. Dietz, "Real-time monitoring and control of GaxIn1-xP Heterostructures by P-Polarized Reflectance Spectroscopy", Proc. of 'Third Pacific Rim International Conference',12-16 July 1998, Honolulu, Hawaii - USA (1998) accepted.
  4. N. Sukidi, K.J. Bachmann, V. Narayanan and S. Mahajan, Initial States of Heteroepitaxy of GaP on Si, J. Electrochem Soc., (1998), accepted.
  5. K.J. Bachmann, S. McCall, S. LeSure, N. Sukidi, and F. Wang, " Chemical Vapor Deposition at High Pressure in a Microgravity Environment", Jpn. J. of Microgravity Sci. (1998), to be published.
  6. N. Dietz, K. Ito and V. Woods, "Real-Time Optical Control of Ga1-xInxP Film Growth by P-Polarized Reflectance", AVS 45th International Symposium to be published in J. Vac. Sci. Technol. A. (1998).
  7. N. Dietz and K. Ito, "Real-time optical Characterization of GaP Heterostructures by P-Polarized Reflectance", Thin Solid Films 313-314(1-2) pp. 615-620 (1998).
  8. D. E. Aspnes and N. Dietz, "Optical Approaches for Controlling Epitaxial Growth", Applied Surface Science 130-132(1-4) pp. 367-376 (1998).
  9. N. Dietz, N. Sukidi, C. Harris and K.J. Bachmann, " Real-time Monitoring of Surface Processes by P-Polarized Reflectance", JVST A 15(3) p. 807-815 (1997).
  10. D.E. Aspnes, N. Dietz, U. Rossow and K.J. Bachmann, "Multilevel Approaches towards Monitoring and Control of Epitaxy", Mat. Res. Soc. Symp. Proc. 448 p.451-462 (1997).
  11. N. Dietz, N. Sukidi, C. Harris and K.J. Bachmann, " Real-time Monitoring of Heteroepitaxial GaxIn1-xP/GaP Growth by P-Polarized Reflectance", Conf. Proc. of IPRM-9’97, ISSN 1092-8669, p. 521 (1997).
  12. N. Dietz, N. Sukidi, C. Harris and K.J. Bachmann, "Real-time Characterization of the Optical Properties of an ultra-thin Surface Reaction Layer during Growth", Mat. Res. Soc. Symp. Proc. 441, p. 425 (1997).
  13. K.Ito and S.S. Ravindran, ``A Reduced Order Method for Simulation and Control of Fluid Flows'', J. Computational Physics, 143 (1998), 403-425.
  14. K.Ito and S.S. Ravindran, ``A Reduced Basis Method for Control Problems Governed by PDEs'', Control Theory for Distributed Parameter Systems: Nonlinear Phenomena, ed. by W.Desch, F.Kappel and K.Kunisch, ISNM 126, Birkhauser (1998), 153-168.
  15. K.Ito and K. Kunisch, ``Optimal Control,'' (1998), Encyclopedia of Electrical and Electronics Engineering, ed. Webster, John Wiley, to appear.
  16. K.Ito and K. Xiong, ``New Gaussian filters for nonlinear filtering problems'', IEEE Trans. AC, (1997), submitted.
  17. H.V. Ly and H.T. Tran, "Proper Orthogonal Decomposition for Flow Calculations and Optimal Control in a horizontal CVD Reactor", CRSC-TR98-13, march, 1998; Quart. Applied Math, to appear.
  18. H.T. Banks, R.C.H. del Rosario, and R.C. Smith, "Reduced Order Model Feedback Control Design: Numerical Implementation in a Thin Shell Model", CRSC-TR98-27, July 1998; IEEE Trans. Auto. Control, submitted.
  19. K.J. Bachmann, H.T. Banks, C. Höpfner, G.M. Kepler, S. LeSure, S.D. McCall, and J.S. Scroggs, "Optimal Design of a High Pressure Organometallic Chemical Vapor Deposition Reactor", CRSC-TR98-14, March 1998; to be submitted.