Multidisciplinary

University

Research

Initiative

1994

MURIRESEARCH CENTERS IN INTELLIGENT DESIGN AND MANUFACTURING IN ELECTRONICS AND MATERIALS PROCESSING

Modeling and Control of Advanced Chemical Vapor Deposition Processes:

The Control of Defects in Mixed III-V Compound Heterostructures

## OBJECTIVES:

Our overall efforts are to design an efficient rapid thermal OMCVD reactor system, including efforts to study the initial phases for heteroepitaxial growth of GaP/Ga(x)IN(1-x)P heterostructures on silicon substrates. The approach involves a combination of remote plasma-assisted nitridation, as the processing approach, and PRS, as the real-time monitoring approach. Other topics include development of real-time measurement techniques, models for nonlinear deposition in a RTOMCVD reactor, and computational methods in support of design of reactor and real time feed back control.

MEMBERS:

Faculty:

K.J. Bachmann

H.T. Banks

N. Dietz

K. Ito

M.J. Kushner

G. Lucovsky

S. Mahajan

J.S. Scroggs

H.T. Tran

Research Associates:

Istvan Lauko

Fuchao Wang

Graduate Students:

Stacie LeSure

Sonya McCall

Vijay Narayanan

Vincent Woods

PUBLICATIONS:

- K.J.
Bachmann, N. Sukidi, C. Hoepfner, C. Harris, N. Dietz,
H.T. Tran, S. Beeler, K. Ito, H.T. Banks, Real-time
monitoring of steady-state pulsed chemical beam epitaxy
by p-polarized reflectance, J. Cryst. Growth, 183 (1998)
323-337.

- V. Narayanan,
N. Sukidi, N. Dietz, K. J. Bachmann, S. Mahajan and S.
Shingubara, "Growth of GaP layers by chemical beam
epitaxy on oxide patterned Si(001) substrates",
Materials & Engineering B 207 (1998), to appear.

- M. Ebert, D.
E. Aspnes, K.J. Bachmann and N. Dietz, "Real-time
monitoring and control of GaxIn1-xP Heterostructures by
P-Polarized Reflectance Spectroscopy", Proc. of
'Third Pacific Rim International Conference',12-16 July
1998, Honolulu, Hawaii - USA (1998) accepted.

- N. Sukidi,
K.J. Bachmann, V. Narayanan and S. Mahajan, Initial
States of Heteroepitaxy of GaP on Si, J. Electrochem
Soc., (1998), accepted.

- K.J.
Bachmann, S. McCall, S. LeSure, N. Sukidi, and F. Wang,
" Chemical Vapor Deposition at High Pressure in a
Microgravity Environment", Jpn. J. of Microgravity
Sci. (1998), to be published.

- N. Dietz, K.
Ito and V. Woods, "Real-Time Optical Control of Ga
_{1-x}In_{x}P Film Growth by P-Polarized Reflectance", AVS 45th International Symposium to be published in J. Vac. Sci. Technol. A. (1998).

- N. Dietz and
K. Ito, "Real-time optical Characterization of GaP
Heterostructures by P-Polarized Reflectance", Thin
Solid Films
**313-314**(1-2) pp. 615-620 (1998).

- D. E. Aspnes
and N. Dietz, "Optical Approaches for Controlling
Epitaxial Growth", Applied Surface Science
**130-132**(1-4) pp. 367-376 (1998).

- N. Dietz, N.
Sukidi, C. Harris and K.J. Bachmann, " Real-time
Monitoring of Surface Processes by P-Polarized
Reflectance", JVST A
**15**(3) p. 807-815 (1997).

- D.E. Aspnes,
N. Dietz, U. Rossow and K.J. Bachmann, "Multilevel
Approaches towards Monitoring and Control of
Epitaxy", Mat. Res. Soc. Symp. Proc.
**448**p.451-462 (1997).

- N. Dietz, N.
Sukidi, C. Harris and K.J. Bachmann, " Real-time
Monitoring of Heteroepitaxial GaxIn1-xP/GaP Growth by
P-Polarized Reflectance", Conf. Proc. of
IPRM-9’97, ISSN 1092-8669, p. 521 (1997).

- N. Dietz, N.
Sukidi, C. Harris and K.J. Bachmann, "Real-time
Characterization of the Optical Properties of an
ultra-thin Surface Reaction Layer during Growth",
Mat. Res. Soc. Symp. Proc.
**441**, p. 425 (1997).

- K.Ito and
S.S. Ravindran, ``A Reduced Order Method for Simulation
and Control of Fluid Flows'', J. Computational Physics,
143 (1998), 403-425.

- K.Ito and
S.S. Ravindran, ``A Reduced Basis Method for Control
Problems Governed by PDEs'', Control Theory for
Distributed Parameter Systems: Nonlinear Phenomena, ed.
by W.Desch, F.Kappel and K.Kunisch, ISNM 126, Birkhauser
(1998), 153-168.

- K.Ito and K.
Kunisch, ``Optimal Control,'' (1998), Encyclopedia of
Electrical and Electronics Engineering, ed. Webster, John
Wiley, to appear.

- K.Ito and K.
Xiong, ``New Gaussian filters for nonlinear filtering
problems'', IEEE Trans. AC, (1997), submitted.

- H.V. Ly and
H.T. Tran, "Proper Orthogonal Decomposition for Flow
Calculations and Optimal Control in a horizontal CVD
Reactor", CRSC-TR98-13, march, 1998; Quart. Applied
Math, to appear.

- H.T. Banks,
R.C.H. del Rosario, and R.C. Smith, "Reduced Order
Model Feedback Control Design: Numerical Implementation
in a Thin Shell Model", CRSC-TR98-27, July 1998;
IEEE Trans. Auto. Control, submitted.

- K.J.
Bachmann, H.T. Banks, C. Höpfner, G.M. Kepler, S.
LeSure, S.D. McCall, and J.S. Scroggs, "Optimal
Design of a High Pressure Organometallic Chemical Vapor
Deposition Reactor", CRSC-TR98-14, March 1998; to be
submitted.